Independent parallel lithography using the atomic force microscope
نویسندگان
چکیده
منابع مشابه
Force Spectroscopy with the Atomic Force Microscope
Introduction and Review Atomic Force Microscope (AFM) Spectroscopy is an AFM based technique to measure, and sometimes control the polarity and strength of the interaction between the AFM tip and the sample. Although the tip-sample interaction may be studied in terms of the energy, the quantity that is measured first is always the tip-sample force, and thus the nomenclature: force spectroscopy....
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Due to its simplicity, the parallel beam approximation (PBA) is commonly used in the analytical evaluation of the spring constant of V-shaped atomic force microscope (AFM) cantilevers. However, the point of contention regarding the validity of the PBA is as yet an unresolved issue, which has been exacerbated by some recent contradictory reports. In this paper, we present a detailed investigatio...
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ژورنال
عنوان ژورنال: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
سال: 1996
ISSN: 0734-211X
DOI: 10.1116/1.588753